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Gravity compensation up to 1kg Voice coil focus stage V-308

High-precision Z-axis supporting fine observation with a minimum movement of 10nm, maximum travel of 7mm, and passive holding up to 1kg.

The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

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  • Other machine elements
  • Actuator
  • Solenoid Actuators
  • Coil focus stage

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Voice Coil Focus Stage V-308 for Semiconductor Manufacturing

Minimum 10 nm resolution, maximum 7 mm stroke. Achieving high-precision Z-axis focus control for semiconductor devices.

In the semiconductor manufacturing field, with the advancement of miniaturization, high-precision position control in the Z-axis direction during inspection, measurement, and exposure processes is becoming increasingly important. Even slight variations in focal position can impact inspection accuracy and process stability. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its gravity compensation feature supports stable positioning even for heavy optical systems and objective lenses, with a capacity of up to 1 kg. The direct drive system provides smooth and fast responsiveness along with high reproducibility, supporting precise focus control in semiconductor manufacturing equipment. 【Application Scenarios】 - Autofocus control for wafer inspection equipment - Z-axis positioning for optical measurement devices - Focus correction for mask inspection equipment - Fine pattern inspection processes 【Benefits of Implementation】 - Improved inspection accuracy through nano-level focus control - Stable holding of optical systems due to weight compensation features - Enhanced inspection throughput due to fast response - Improved process stability

  • csm_V-308_753030_ISO2_bbe89fe339.jpg
  • csm_V-308_OH1_00541_7f8815d87f.jpg
  • csm_V-308_753030_KUZ_a3ff48af57.jpg
  • csm_PI-C-414_13030_5dbacccef4.jpg
  • Other machine elements
  • Actuator
  • Solenoid Actuators
  • Coil focus stage

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You can't add any more bookmarks

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